From the national program TKI (Top consortia for Knowledge and Innovation), funding has been acquired to build a framework that derives mathematical-physical formulae from data and human expertise. The goal will be the extraction and representation of mathematical-physical models governing semiconductor manufacturing processes (physical model discovery) in the form of partial differential equations. The project will be co-funded by and carried out in cooperation with ASML (Maxim Pisarenco and Jacek Kustra). Two PhD students will be appointed in the KPAI project, one in CASA and one in the cluster Data and AI. Project leaders from both clusters are Barry Koren and Jakub Tomczak, respectively.
